Magnetic field sensor with permanent magnet biasing

ABSTRACT

A magnetic field sensor for sensing an external magnetic field along a sensing direction oriented perpendicular to a plane of the magnetic field sensor comprises a sensor bridge. The sensor bridge has a first sensor leg that includes a first magnetoresistive sense element and a second sensor leg that includes a second magnetoresistive sense element. The first and second sense elements include respective first and second pinned layers having corresponding first and second reference magnetizations within the plane and oriented in the same direction. The first and second sense elements further include respective first and second sense layers, each having an indeterminate magnetization state. A permanent magnet layer is proximate the magnetoresistive sense elements. In the absence of an external magnetic field, the permanent magnet layer magnetically biases the indeterminate magnetization state of each sense layer to produce a sense magnetization of the first and second sense layers.

TECHNICAL FIELD OF THE INVENTION

The present invention relates generally to magnetoelectronic devices. More specifically, the present invention relates to a magnetic field sensor with multiple axis sensing and permanent magnet biasing.

BACKGROUND OF THE INVENTION

Magnetic field sensors, also known as magnetometers, are widely used in a number of applications including in, for example, compass, security, and military applications, geophysics and space research, biomagnetism and medical applications, and non-destructive testing. Magnetic field sensors are typically based on semiconductor materials (e.g., Hall sensors, magnetoresistors, and so forth) and ferromagnetic materials (e.g., ferromagnetic magnetoresistors and flux guides). Other magnetic field sensors utilize optical, resonant, and superconducting properties.

In many Earth's field magnetic sensing applications, especially those involving compassing or orientation, it is extremely desirable to have three-axis sensing capability. In order to achieve low cost of such sensors, it is also desirable that the solution be a single chip or even fully integrable onto the accompanying application specific integrated circuit (ASIC) die. In handheld and miniaturized applications it is also critical to minimize power consumption in order to extend battery life.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying figures in which like reference numerals refer to identical or functionally similar elements throughout the separate views, the figures are not necessarily drawn to scale, and which together with the detailed description below are incorporated in and form part of the specification, serve to further illustrate various embodiments and to explain various principles and advantages all in accordance with the present invention.

FIG. 1 shows a simplified side view of an exemplary magnetoresistive sense element with an accompanying plot of variable resistance that may occur in the presence of an external magnetic field;

FIG. 2 shows a simplified block diagram of a magnetic field sensor package;

FIG. 3 shows a simplified schematic view of a magnetic field sensor having indeterminate magnetic biasing;

FIG. 4 shows a simplified schematic view of an X-axis magnetic field sensor of the magnetic field sensor package of FIG. 2;

FIG. 5 shows a table demonstrating magnetization vectors of the X-axis magnetic field sensor;

FIG. 6 shows a simplified schematic view of a Y-axis magnetic field sensor of the magnetic field sensor package of FIG. 2;

FIG. 7 shows a table demonstrating magnetization vectors of the Y-axis magnetic field sensor;

FIG. 8 shows a simplified schematic view of a Z-axis magnetic field sensor of the magnetic field sensor package of FIG. 2;

FIG. 9 shows a table demonstrating magnetization vectors of the Z-axis magnetic field;

FIG. 10 shows a table of simplified plan views summarizing the function of the segments of the permanent magnet layer for biasing the sense layers of the magnetoresistive sense elements to achieve the three-axis sensing capability of the magnetic field sensor package of FIG. 2; and

FIG. 11 shows a flowchart of a fabrication process for manufacturing the magnetic field sensor package of FIG. 2.

DETAILED DESCRIPTION

In overview, embodiments disclosed herein entail a magnetic field sensor capable of sensing magnetic fields along one or more mutually exclusive sense axes, typically referred to as the X-axis, Y-axis, and Z-axis. More particularly, a unique sensor bridge design of magnetoresistive sense elements is implemented for each sense axis. Each sensor bridge incorporates an in-plane orientation of reference magnetization of the pinned layer. For each sensor bridge, one or more permanent magnet layers are strategically patterned (shape and position) to generate a unique external bias field vector of the sense magnetization of the sense layer to produce a balanced bridge configuration of magnetoresistive sense elements for the sensor bridge without built-in, zero field offset. Additionally, one sensor bridge design is utilized for sensing an external magnetic field that is perpendicular to the plane of the magnetic field sensor package without the use of flux concentrators. The strategically patterned permanent magnet layer(s) for this sensor bridge additionally allows it to respond to the out-of-plane external magnetic field without inter-axis coupling of sensor response. The various inventive concepts and principles embodied herein enable an ultra-low power, multiple sense axis magnetic field sensor without detrimental perming effects for improved sensitivity, reliability, and cost savings.

The instant disclosure is provided to further explain in an enabling fashion the best modes, at the time of the application, of making and using various embodiments in accordance with the present invention. The disclosure is further offered to enhance an understanding and appreciation for the inventive principles and advantages thereof, rather than to limit in any manner the invention. The invention is defined solely by the appended claims including any amendments made during the pendency of this application and all equivalents of those claims as issued.

It should be understood that the use of relational terms, if any, such as first and second, top and bottom, and the like may be used herein solely to distinguish one from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Furthermore, some of the figures may be illustrated using various shading and/or hatching to distinguish the different elements produced within the various structural layers. These different elements within the structural layers may be produced utilizing current and upcoming microfabrication techniques of depositing, patterning, etching, and so forth. Accordingly, although different shading and/or hatching is utilized in the illustrations, the different elements within the structural layers may be formed out of the same material.

Referring to FIG. 1, FIG. 1 shows a simplified side view of an exemplary magnetoresistive sense element 20 with an accompanying plot 22 of variable resistance 26 that may occur in the presence of an external magnetic field, represented by arrows 28, 30. More particularly, magnetoresistive sense element 20 may be a magnetic tunnel junction (MTJ) sensor. An MTJ structure includes a metal-insulator-metal layer sandwich in which the metal layers are ferromagnetic and the insulator layer is very thin. Electrically, this forms a tunnel diode in which electrons can tunnel from one ferromagnet into the other. Such a tunnel diode exhibits transport characteristics that depend, not only on the voltage bias, but also on the magnetic states of the top and bottom electrodes. Magnetoresistive sense element 20 is an exemplary magnetic tunnel junction (MTJ) structure that includes ferromagnetic layers 32, 34 separated by an insulator layer 36. An electrode 38 may be in electrical communication with ferromagnetic layer 32 and another electrode 40 may be in electrical communication with ferromagnetic layer 34. This structure may be formed within a dielectric material, not shown herein for simplicity.

In the side view illustration of FIG. 1, a Z-axis 42 is oriented up-and-down on the page, an X-axis 44 is oriented right-and-left on the page, and a Y-axis 46 is represented as a dot that depicts an axis going either into or out of the page on which FIG. 1 is situated. Thus, the X-Y plane in this side view illustration is oriented right-and-left and into or out of the page. Accordingly, external magnetic field 28 represents a magnetic field that is parallel to the X-Y plane of magnetoresistive sense element 20. More particularly, external magnetic field 28 is generally parallel to X-axis 44. Conversely, external magnetic field 30 represents a magnetic field that is perpendicular to the X-Y plane of magnetoresistive sense element 20. That is, external magnetic field is generally parallel to Z-axis 42.

Ferromagnetic layer 32 may be fixed, or “pinned,” to have a reference magnetization, as represented by a solid arrow 48. Therefore, ferromagnetic layer 32 is referred to hereinafter as pinned layer 32. Ferromagnetic layer 34 is “free” to respond to, i.e., sense, the applied magnetic field (e.g., external magnetic field 38, 40) to provide a sense magnetization, represented by a dotted arrow 50. Sense magnetization 50 modulates the measured resistance 26. Accordingly, ferromagnetic layer 34 is referred to hereinafter as sense layer 34.

At a fixed voltage bias, resistance 26 depends upon the magnetic states of electrodes 38, 40. Since electrodes 38, 40 are electrically coupled with pinned and sense layers 32, 34, respectively, the states of electrodes 38, 40 depend upon the alignment of the magnetic moments of the pinned and sense layers 32, 34. By way of example and referring to plot 22, in the presence of X-axis external magnetic field 28, when the magnetic moments of pinned and sense layers 32, 34 are parallel (i.e., the vectors lie along parallel lines and point in the same direction) resistance 26 of the junction is lowest. However, resistance 26 of the junction is highest when the magnetic moments are anti-parallel (i.e., the vectors lie along parallel lines but point in the opposite direction). And in between, resistance 26 of the junction varies as the cosine of the angle between magnetic moments. One or more MTJ resistors, such as magnetoresistive sense element 20, may be utilized to form either of an X-axis or a Y-axis magnetic field sensor for sensing an external magnetic field that is parallel to the X-Y plane of magnetoresistive sense element 20.

In order to sense Z-axis magnetic field 30 in a direction perpendicular to the X-Y plane of magnetoresistive sense element 32, one or more flux guides 52 (one shown in dashed line form) are also formed within the dielectric material (not shown) in which magnetoresistive sense element 20 is formed. Per convention, flux guides 52 can be used to guide Z-axis magnetic field 30 into the X-Y plane. Flux guides 52 are generally thin, narrow sheets of magnetic material typically used to guide flux, i.e., Z-axis magnetic field 30, to a preferred location. With the use of flux guides 52 incorporated into, for example, a Z-axis magnetic field sensor, Z-axis magnetic field 30 is suitably guided so that it can be sensed using one or more in-plane magnetoresistive sense elements 20.

For optimal Z axis response, flux guides 52 have a preferred magnetization orientation. That is, the magnetic polarization for each of flux guides 52 will be directed in a uniform, i.e., generally single, direction. Unfortunately, flux guides 52 are susceptible to corruption by exposure to externally applied magnetic fields (e.g., disturbing fields of approximately one hundred Gauss or more). This corruption, typically referred to as perming, can alter the magnetic state of flux guides 52 leading to unstable device characteristics including offset, axis alignment, and noise. Large offset shifts, axis rotations, and excess noise can be very difficult or even impossible to compensate/calibrate out of the sensor response and can render Z-axis magnetic field sensor 20 unusable.

FIG. 2 shows a simplified block diagram of a magnetic field sensor package 54. Magnetic field sensor package 54 may be implemented in any device or system in which magnetic field sensing is required, for example, in compass, security, and military applications, in geophysics and space research applications, in biomagnetism and medical applications, and/or in non-destructive testing. In this example, sensor package 54 may be adapted to sense a magnetic field along three axes. Hence, sensor package 54 includes an X-axis magnetic field sensor 56, a Y-axis magnetic field sensor 58, and a Z-axis magnetic field sensor 60. Magnetic field sensors 56, 58, 60 may be coupled to, or otherwise in communication with, an application specific integrated circuit (ASIC) 62 to form sensor package 54. ASIC 62 performs some or all functions including, but not limited to, signal conditioning and data management, reset and stabilization control, bridge/output multiplexing, self-test, electrostatic discharge (ESD) protection, and so forth.

FIG. 3 shows a simplified schematic view of a magnetic field sensor 64 having indeterminate sense magnetization. In general, magnetic field sensor 64 includes a sensor bridge, such as a Wheatstone bridge 66. Wheatstone bridge 66 includes four sensor legs 68, each sensor leg 68 including one or more magnetoresistive elements, which may be MTJ structures 70. Each MTJ structure 70 includes a pinned layer 72 and a sense layer 74 separated by an insulator layer 76. In this example, pinned layer 72 of each MTJ structure 70 may be fixed, or “pinned,” to have a reference magnetization 78, as represented by a solid arrow. However, sense layer 76 has little or no initial (i.e., preset) direction of magnetization, referred to herein as indeterminate sense magnetization 80, as exemplified in FIG. 3 by the term “NONE”.

As will be discussed in significantly greater detail below, magnetic field sensor package 54 employs a triad of unique sensor bridge designs for X-axis 44, Y-axis 46, and Z-axis 42 magnetic field sensing using magnetoresistive sense elements, such as MTJ structures. Each sensor bridge incorporates an in-plane orientation of reference magnetization of the pinned layer. For each sensor bridge, one or more permanent magnet layers are strategically patterned (shape and position) to magnetically bias the indeterminate sense magnetization of the sense layer of the various magnetoresistive sense elements in order to generate a unique external bias field vector of the sense magnetization of the sense layer. Suitable biasing of the sense/free layer can be performed in different directions by placing the magnetoresistive sense elements proximate segments of the permanent magnet layer(s), in which the permanent magnet layer(s) are oriented at specific angles with respect to the sense layer. Accordingly, orthogonal bias fields can be created within different sensor bridges to enable X-axis, Y-axis, and/or Z-axis sensor bridges. Furthermore, the strategically patterned permanent magnet layer(s) for a Z-axis sensor bridge design allows it to respond to the out-of-plane external magnetic field without the use of flux concentrators and without inter-axis coupling of sensor response.

Now referring to FIG. 4, FIG. 4 shows a simplified schematic view of X-axis magnetic field sensor 56 of magnetic field sensor package 54 (FIG. 2). Accordingly, X-axis magnetic field sensor 56 is sensitive to X-axis external magnetic field 28 in a sensing direction (referred to herein as X sensing direction 96) parallel to X-axis 44 and therefore parallel to an X-Y plane 98 (see FIG. 5) of magnetic field sensor package 54 (FIG. 2). X-axis magnetic field sensor 56 produces an output signal 100, labeled V_(X-OUT), indicative of the magnitude of X-axis external magnetic field 28.

X-axis magnetic field sensor 56 includes a sensor bridge, and more particularly, a Wheatstone bridge, referred to herein as an X-axis Wheatstone bridge 102. Thus, X-axis magnetic field sensor 56 includes first, second, third, and fourth sensor legs 104, 106, 108, 110, respectively. First sensor leg 104 includes one or more first magnetoresistive sense elements 112, second sensor leg 106 includes one or more second magnetoresistive sense elements 114, third sensor leg 108 includes one or more third magnetoresistive sense elements 116, and fourth sensor leg 110 includes one or more fourth magnetoresistive sense elements 118. In an embodiment, magnetoresistive sense elements 112, 114, 116, 118 may be MTJ structures. Only one each of magnetoresistive sense elements 112, 114, 116, 118 is shown for simplicity of illustration. Those skilled in the art will readily recognize that X-axis magnetic field sensor 56 can include any number of magnetoresistive sense elements 112, 114, 116, 118.

First and fourth magnetoresistive sense elements 112, 118 are coupled in series to form a first half of X-axis Wheatstone bridge 102 and second and third magnetoresistive sense elements 114, 116 are coupled in series to form a second half of X-axis Wheatstone bridge 102. Thus, the first half of X-axis Wheatstone bridge 102 is coupled in parallel with the second half of X-axis Wheatstone bridge 102 such that a junction 120 of first and second magnetoresistive sense elements 112, 114 forms a first input terminal 122 and a junction 124 of third and fourth magnetoresistive sense elements 116, 118 forms a second input terminal 126. Thus, V_(X-OUT) 100 is between midpoints of the series combination of first and fourth magnetoresistive sense elements 112, 118 and second and third magnetoresistive sense elements 114, 116.

For illustrative purposes, resistances are provided in association with magnetoresistive sense elements 112, 114, 116, 118. In this example, a resistance 128, R1_(X), represents the signal output of first magnetoresistive sense element 112. A resistance 130, R2_(X), represents the signal output of second magnetoresistive sense element 114. A resistance 132, R3_(X), represents the signal output of third magnetoresistive sense element 116. And, a resistance 134, R4_(X), represents the signal output of fourth magnetoresistive sense element 118.

First magnetoresistive sense element 112 includes a first pinned layer 136 and a first sense layer 138 separated by an insulator layer 140. Similarly, second magnetoresistive sense element 114 includes a second pinned layer 142 and a second sense layer 144 separated by an insulator layer 146. Third magnetoresistive sense element 116 includes a third pinned layer 148 and a third sense layer 150 separated by an insulator layer 152. Fourth magnetoresistive sense element 118 includes a fourth pinned layer 154 and a fourth sense layer 156 separated by an insulator layer 158.

Additionally, X-axis magnetic sensor 56 includes a first permanent magnet layer 160 positioned proximate each of first, second, third, and fourth magnetoresistive sense elements 112, 114, 116, 118. In this example embodiment, X-axis magnetic sensor 56 further includes a second permanent magnet layer 161 position proximate each of first, second, third, and fourth magnetoresistive sense elements 112, 114, 116, 118. As will be discussed below, first and second permanent magnet layers 160, 161 function cooperatively to magnetically bias indeterminate sense magnetization 80 (FIG. 3) of each of magnetoresistive sense elements 112, 114, 116, 118. In order to enable the suitable magnetic biasing and to concurrently enable efficiency in fabrication, first and second permanent magnet layers 160, 161 has a single magnetic orientation and a single thickness.

In this illustration, first and second permanent magnet layers 160, 161 are located out-of-plane from magnetoresistive sense elements 112, 114, 116, 118 and first and second permanent magnet layers 160, 161 have a vertical magnetization orientation. For example, first permanent magnet layer 160 is located out-of-plane above magnetoresistive sense elements 112, 114, 116, 118, second permanent magnet layer 161 is located out-of-plane below magnetoresistive sense elements 112, 114, 116, 118, and the magnetization orientation of first and second permanent magnet layers 160, 161 is parallel to Z-axis 42. The two layer, vertical permanent magnet biasing configuration is described herein for illustrative purposes. In other embodiments, at least one of permanent magnet layers 160, 161 may be generally co-planar with magnetoresistive sense elements 112, 114, 116, 118. Further, although two permanent magnet layers 160, 161 are shown, alternative embodiments may include one or more than two permanent magnet layers. Still further, the one or more permanent magnet layers may have an in-plane magnetization configuration.

Referring concurrently to FIGS. 4 and 5, FIG. 5 shows a table 162 demonstrating magnetization vectors of X-axis magnetic field sensor 56. More particularly, table 162 provides a top view representation 164 of magnetoresistive sense elements 112, 114, 116, 118 and a side view representation 166 of magnetoresistive sense elements 112, 114, 116, 118. Top view representation 164 includes a symbol representing top views of first and third magnetoresistive sense elements 112, 116 with a segment 168 of first permanent magnet layer 160 and a segment 170 of second permanent magnet layer 161. Top view representation 164 further includes another symbol representing top views of second and fourth magnetoresistive sense elements 114, 118 with a segment 172 of first permanent magnet layer 160 and another segment 174 of second permanent magnet layer 161. Side view representation 166 provides a symbol representing side views of first and third magnetoresistive sense elements 112, 116 and another symbol representing side views of second and fourth magnetoresistive sense elements 114, 118. A dielectric material 176 surrounds magnetoresistive sense elements 112, 114, 116, 118. Dielectric material 176 is included with the side views representing first and third magnetoresistive sense elements 112, 116 as well as second and fourth magnetoresistive sense elements 114, 118 to illustrate an out-of-plane locations of first permanent magnet layer 160 above magnetoresistive sense elements 112, 114, 116, 118 and second permanent magnet layer 161 below magnetoresistive sense elements 112, 114, 116, 118.

Each of first and third pinned layers 136, 148 has a first reference magnetization 178 and each of second and fourth pinned layers 142, 154 has a second reference magnetization 180, each of which is oriented substantially parallel to X-Y plane 98. In some embodiments, each of first and second reference magnetizations 178, 180 may be oriented parallel to Y axis 46. Additionally, second reference magnetization 180 of second and fourth pinned layers 142, 154 is oriented in the same direction as first reference magnetization 178 of first and third pinned layers 136, 148. Thus, as shown in FIG. 4 and side view representation 166 of FIG. 5, each of first reference magnetization 178 and second reference magnetization 180 is represented by a circle inscribed by an X denoting a direction going into the page. As further shown in top view representation 164 of FIG. 5, each of first reference magnetization 178 and second reference magnetization 180 is represented by a solid arrow directed upwardly and is oriented parallel to Y-axis 46.

Sense layers 138, 144, 150, 156 of magnetoresistive sense elements 112, 114, 116, 118 have little or no initial (i.e., preset) magnetic orientation. Thus, magnetoresistive sense elements 112, 114, 116, 118 have an initial magnetic orientation that is indeterminate, e.g., indeterminate sense magnetization 80 (FIG. 3). In accordance with an embodiment, first and second permanent magnet layers 160, 161 magnetically bias first and third sense layers 138, 150 to have a first sense magnetization 182. Likewise, permanent magnet layer 160 magnetically biases second and fourth sense layers 144, 156 to have a second sense magnetization 184. As shown, first and second sense magnetizations 182, 184 are oriented in opposing directions. That is, first and second sense magnetizations 182, 184 are in an in-plane orientation relative to X-Y plane 98. However, both of first and second sense magnetizations 182, 184 are skewed away from X-axis 44 and Y-axis 46. In FIG. 4 and in side view representation 166 of FIG. 5, first and second sense magnetizations 182, 184 are represented by dotted arrows in which first sense magnetization 182 is directed rightwardly on the page and second sense magnetization 184 is directed leftwardly on the page. In top view representation 164 of FIG. 5, first sense magnetization 182 is directed rightwardly on the page, but is skewed away from both X-axis 44 and Y-axis 46. Similarly, second sense magnetization 184 is directed leftwardly on the page, but is skewed away from both X-axis 44 and Y-axis 46. In general, first and second sense magnetizations 182, 184 are orientable in response to X magnetic field 28 in X sensing direction 96.

In order to achieve the particular orientation of first and second sense magnetizations 182, 184, a magnetization direction 186 of segments 168, 172 of first permanent magnet layer 160 and magnetization segments 170, 174 of second permanent magnet layer 161 may oriented substantially parallel to Z-axis 42. Thus, magnetization direction 186 of segments 168, 170, 172, 174 is represented in FIG. 4 and in side view representation 166 arrows directed downwardly on the page, and magnetization direction 186 of segments 168, 170, 172, 174 is represented in top view representation 164 of FIG. 5 by circles with an inscribed X, denoting a direction going into the page. A single magnetization direction 186 of first and second permanent magnet layers 160, 161 as well as the location and geometry of the various segments of first and second permanent magnet layers 160, 161, is useful in achieving the three-axis sensing capability of magnetic field sensor package 54 (FIG. 2), as will be discussed in connection with FIG. 10.

In order to better appreciate these various directions of magnetization direction 186 of first and second permanent magnet layers 160, 161, first and second reference magnetizations 178, 180, and first and second sense magnetizations 182, 184, their orientations are defined herein by Miller indices. Miller indices are a notation system typically used to specify directions and planes. For example, they can be used to specify a direction of a vector, r, from the origin to a point. Typically, the notation [hkl] represents the direction, where the Miller indices h, k, and l are replaced by three integers, and the notation <hkl> represents a family of directions. A negative direction is denoted with a bar on top of one or more of the three integers. In a cubic system, each of the directions in a family of directions has the same indices regardless of order or sign.

Utilizing the Miller index notation system, where h, k, and l are Miller indices 188 and <hkl> represents a family of directions 190, magnetization direction 186 of segments 168, 172 of first permanent magnet layer 160 and segments 172, 174 of second permanent magnet layer 161 is oriented in a single direction, which may be characterized by Miller indices 188 of [001]. Accordingly, magnetization direction 186 is characterized by a single magnetization orientation perpendicular to X-Y plane 98.

The orientation, or direction, of first reference magnetization 178 for first and third pinned layers 136, 148 of first and third magnetoresistive sense elements 112, 116 can be characterized by Miller indices of [010]. Similarly, the orientation, or direction, of second reference magnetizations 180 of second and fourth pinned layers 142, 154 of second and fourth magnetoresistive sense elements 114, 118 can be characterized by Miller indices of [010]. Thus, first and second reference magnetizations 178, 180 are oriented in the same direction parallel to Y-axis 46.

In the absence of an external magnetic field (e.g., X magnetic field 28), segments 168 of first permanent magnet layer 160 and segments 170 of second permanent magnet layer 161 positioned proximate first and third magnetoresistive sense elements 112, 116 magnetically bias first sense magnetization 182 in a first direction 187 within X-Y plane 98 that is skewed away from each of X-axis 44 and Y-axis 46 by approximately forty-five degrees. Likewise, segments 172 of first permanent magnet layer 160 and segments 174 of second permanent magnet layer 161 positioned proximate second and fourth magnetoresistive sense elements 114, 118 magnetically bias second sense magnetization 184 in a second direction 189 relative to direction 187 that is also skewed away from each of X-axis 44 and Y-axis 46 by approximately forty five degrees. Thus, utilizing the Miller index notation system, first sense magnetization 182 can be characterized by Miller indices 188 of [110] and second sense magnetization 184 can be characterized by Miller indices 188 of [110].

Now referring to FIG. 6, FIG. 6 shows a simplified schematic view of Y-axis magnetic field sensor 58 of magnetic field sensor package 54 (FIG. 2). Accordingly, Y-axis magnetic field sensor 58 is sensitive to a Y-axis external magnetic field 192 in a sensing direction (referred to herein as Y sensing direction 194) parallel to Y-axis 46 and therefore parallel to an X-Y plane 98 (see FIG. 7) of magnetic field sensor package 54 (FIG. 2). Y-axis magnetic field sensor 58 produces an output signal 196, labeled V_(Y-OUT), indicative of the magnitude of Y-axis external magnetic field 192.

Y-axis magnetic field sensor 58 includes a sensor bridge, and more particularly, a Wheatstone bridge, referred to herein as a Y-axis Wheatstone bridge 198. Thus, Y-axis magnetic field sensor 58 includes first, second, third, and fourth sensor legs 200, 202, 204, 206, respectively. First sensor leg 200 includes one or more first magnetoresistive sense elements 208, second sensor leg 202 includes one or more second magnetoresistive sense elements 210, third sensor leg 204 includes one or more third magnetoresistive sense elements 212 and fourth sensor leg 206 includes one or more fourth magnetoresistive sense elements 214. Only one each of magnetoresistive sense elements 208, 210, 212, 214 is shown for simplicity of illustration. Those skilled in the art will readily recognize that Y-axis magnetic field sensor 58 can include any number of magnetoresistive sense elements 208, 210, 212, 214.

First and fourth magnetoresistive sense elements 208, 214 are coupled in series to form a first half of Y-axis Wheatstone bridge 198 and second and third magnetoresistive sense elements 210, 212 are coupled in series to form a second half of Y-axis Wheatstone bridge 198. Thus, the first half of Y-axis Wheatstone bridge 198 is coupled in parallel with the second half of Y-axis Wheatstone bridge 198 such that a junction 216 of first and second magnetoresistive sense elements 208, 210 forms a first input terminal 218 and a junction 220 of third and fourth magnetoresistive sense elements 212, 214 forms a second input terminal 222. Thus, V_(Y-OUT) 196 is between midpoints of the series combination of first and fourth magnetoresistive sense elements 208, 214 and second and third magnetoresistive sense elements 210, 212.

For illustrative purposes, resistances are provided in association with magnetoresistive sense elements 208, 210, 212, 214. In this example, a resistance 224, R1_(Y), represents the signal output of first magnetoresistive sense element 208. A resistance 226, R2_(Y), represents the signal output of second magnetoresistive sense element 210. A resistance 228, R3_(Y), represents the signal output of third magnetoresistive sense element 212. And, a resistance 230, R4_(Y), represents the signal output of fourth magnetoresistive sense element 214.

First magnetoresistive sense element 208 includes a first pinned layer 232 and a first sense layer 234 separated by an insulator layer 236. Similarly, second magnetoresistive sense element 210 includes a second pinned layer 238 and a second sense layer 240 separated by an insulator layer 242. Third magnetoresistive sense element 212 includes a third pinned layer 244 and a third sense layer 246 separated by an insulator layer 248. Fourth magnetoresistive sense element 214 includes a fourth pinned layer 250 and a fourth sense layer 252 separated by an insulator layer 254.

Additionally, Y-axis magnetic sensor 58 includes first permanent magnet layer 160 and second permanent magnet layer 161 positioned proximate each of first, second, third, and fourth magnetoresistive sense elements 208, 210, 212, 214. First and second permanent magnet layers 160, 161 function cooperatively to magnetically bias indeterminate sense magnetization 80 (FIG. 3) of each of magnetoresistive sense elements 208, 210, 212, 214. Like X-axis magnetic sensor 56 (FIG. 5), first permanent magnet layer 160 is located out-of-plane above magnetoresistive sense elements 208, 210, 212, 214 and second permanent magnet layer 160 is located out-of-plane below magnetoresistive sense elements 208, 210, 212, 214.

Referring concurrently to FIGS. 6 and 7, FIG. 6 shows a table 256 demonstrating magnetization vectors of Y-axis magnetic field sensor 58. More particularly, table 256 provides a top view representation 258 of magnetoresistive sense elements 208, 210, 212, 214 and a side view representation 260 of magnetoresistive sense elements 208, 210, 212, 214. Top view representation 258 includes a symbol representing top views of first and third magnetoresistive sense elements 208, 212 with a segment 262 of first permanent magnet layer 160 and a segment 264 of second permanent magnet layer 161. Top view representation 258 further includes another symbol representing top views of second and fourth magnetoresistive sense elements 210, 214 with a segment 266 of first permanent magnet layer 160 and a segment 268 of second permanent magnet layer 161. Side view representation 260 provides a symbol representing side views of first and third magnetoresistive sense elements 208, 212 and another symbol representing side views of second and fourth magnetoresistive sense elements 210, 214. Again, dielectric material 176 surrounds magnetoresistive sense elements 208, 210, 212, 214.

Each of first and third pinned layers 232, 244 has a first reference magnetization 270 and each of second and fourth pinned layers 238, 250 has a second reference magnetization 272, each of which is oriented substantially parallel to X-Y plane 98. Further, each of first and second reference magnetizations 270, 272 may be oriented in the same direction parallel to X-axis 44. Thus, as shown in FIG. 6 and side view representation 260 of FIG. 7, first and second reference magnetizations 270, 272 are represented by circles with an inscribed X, denoting a direction going into the page. Additionally, as shown in top view representation 258 of FIG. 7, each of first reference magnetization 270 and second reference magnetization 272 is represented by a solid arrow directed rightwardly substantially parallel to X-axis 44.

Sense layers 234, 240, 246, 252 of magnetoresistive sense elements 208, 210, 212, 214 have an initial magnetic orientation that is indeterminate, e.g., indeterminate sense magnetization 80 (FIG. 3). In accordance with an embodiment, first and second permanent magnet layers 160, 161 magnetically bias first and third sense layers 234, 246 to have a first sense magnetization 274. Likewise, first and second permanent magnet layers 160, 161 magnetically bias second and fourth sense layers 240, 252 to have a second sense magnetization 276. As shown, first and second sense magnetizations 274, 276 are oriented in different directions. That is, first and second sense magnetizations 274, 276 are in an in-plane orientation relative to X-Y plane 98. However, both of first and second sense magnetizations 274, 276 are skewed away from X-axis 44 and Y-axis 46. In FIG. 6 and in side view representation 260 of FIG. 7, first and second sense magnetizations 274, 276 are represented by dotted arrows in which first sense magnetization 274 is directed rightwardly on the page and second sense magnetization 276 is directed leftwardly on the page. However, in top view representation 258 of FIG. 7, first sense magnetization 274 is represented by a dotted arrow that is directed rightwardly on the page but is skewed away from both X-axis 44 and Y-axis 46 and second sense magnetization 276 is represented by a dotted arrow that is directed leftwardly on the page, but is skewed away from both X-axis 44 and Y-axis 46. In general, first and second sense magnetizations 274, 276 are orientable in response to Y magnetic field 192 in Y sensing direction 194.

In order to achieve the particular orientation of first and second sense magnetizations 274, 276, magnetization direction 186 of segments 262, 266 of first permanent magnet layer 160 and magnetization direction 186 of segments 264, 268 of second permanent magnet layer 161 may again be oriented substantially parallel to Z-axis 42. Thus, magnetization direction 186 of segments 262, 264, 266, 268 is represented in FIG. 6 and in side view representation 260 of FIG. 7 by arrows directed downwardly on the page. However, magnetization direction 186 of segments 262, 264, 266, 268 is represented in top view representation 258 of FIG. 7 by circles with an inscribed X, denoting a direction going into the page. The single magnetization direction 186 of first and second permanent magnet layers 160, 161 as well as the location and geometry of the various segments of first and second permanent magnet layers 160, 161, is useful in achieving the three-axis sensing capability of magnetic field sensor package 54 (FIG. 2), as will be discussed in connection with FIG. 10.

Again utilizing the Miller index notation system, magnetization direction 186 of segments 262, 264, 266, 268 of permanent magnet layers 160, 161 may be characterized by Miller indices 188 of [001] denoting that magnetization direction 186 is parallel to Z-axis 42. The orientation, or direction, of first reference magnetization 270 for first and third pinned layers 232, 244 of first and third magnetoresistive sense elements 208, 212 can be characterized by Miller indices 188 of [001]. Likewise, the orientation, or direction, of second reference magnetization 272 of second and fourth pinned layers 238, 250 of second and fourth magnetoresistive sense elements 210, 214 can be characterized by Miller indices 188 of [100]. Thus, first and second reference magnetizations 270, 272 are oriented in the same direction parallel to X-axis 46.

In the absence of an external magnetic field (e.g., Y magnetic field 194), segments 262 of first permanent magnet layer 160 and segments 264 of second permanent magnet layer 161 positioned proximate first and third magnetoresistive sense elements 208, 212 magnetically bias first sense magnetization 274 in a first direction 275 within X-Y plane 98 that is skewed away from each of X-axis 44 and Y-axis 46 by approximately forty-five degrees. Likewise, segments 266 of first permanent magnet layer 160 and segments 268 of second permanent magnet layer 161 positioned proximate second and fourth magnetoresistive sense elements 210, 214 magnetically bias second sense magnetization 276 in second direction 277 relative to direction 275 that is also skewed away from each of X-axis 44 and Y-axis 46 by approximately forty five degrees. Thus, utilizing the Miller index notation system, first sense magnetization 274 can be characterized by Miller indices 188 of [110] and second sense magnetization 276 can be characterized by Miller indices 188 of [110].

Accordingly, referring briefly to FIG. 5 in connection with FIG. 7, direction 187 of first sense magnetization 182 for first and third magnetoresistive sense elements 112, 116 of X-axis magnetic field sensor 56 is the same as direction 275 of first sense magnetization 274 for first and third magnetoresistive sense elements 208, 212 of Y-axis magnetic field sensor 58. However, direction 189 of second sense magnetization 184 for second and fourth magnetoresistive sense elements 114, 118 of X-axis magnetic field sensor 56 differs from direction 277 of second sense magnetization 268 for second and fourth magnetoresistive sense elements 210, 214 of Y-axis magnetic field sensor 58. This is achieved by suitable location and geometry and magnetization direction of the segments of first and second permanent magnet layers 160, 161.

Now referring to FIG. 8, FIG. 8 shows a simplified schematic view of Z-axis magnetic field sensor 60 of magnetic field sensor package 54 (FIG. 2). Accordingly, Z-axis magnetic field sensor 60 is sensitive to Z-axis external magnetic field 30 in a sensing direction (referred to herein as a Z sensing direction 278) parallel to Z-axis 42 and therefore perpendicular to X-Y plane 98 (see FIG. 9) of magnetic field sensor package 54. Z-axis magnetic field sensor 60 produces an output signal 280, labeled V_(Z-OUT), indicative of the magnitude of Z-axis external magnetic field 30.

Z-axis magnetic field sensor 60 includes a sensor bridge, and more particularly, a Wheatstone bridge, referred to herein as a Z-axis Wheatstone bridge 282. Thus, Z-axis magnetic field sensor 60 includes first, second, third, and fourth sensor legs 284, 286, 288, 290, respectively. First sensor leg 284 includes one or more first magnetoresistive sense elements 292, second sensor leg 286 includes one or more second magnetoresistive sense elements 294, third sensor leg 288 includes one or more third magnetoresistive sense elements 296, and fourth sensor leg 290 includes one or more fourth magnetoresistive sense elements 298. Only one each of magnetoresistive sense elements 292, 294, 296, 298 is shown for simplicity of illustration. Those skilled in the art will readily recognize that Z-axis magnetic field sensor 60 can include any number of magnetoresistive sense elements 292, 294, 296, 298.

First and fourth magnetoresistive sense elements 292, 298 are coupled in series to form a first half of Z-axis Wheatstone bridge 282 and second and third magnetoresistive sense elements 294, 296 are coupled in series to form a second half of Z-axis Wheatstone bridge 282. Thus, the first half of Z-axis Wheatstone bridge 282 is coupled in parallel with the second half of Z-axis Wheatstone bridge 282 such that a junction 300 of first and second magnetoresistive sense elements 292, 294 forms a first input terminal 302 and a junction 304 of third and fourth magnetoresistive sense elements 296, 298 forms a second input terminal 306. Thus, V_(Z-OUT) 280 is between midpoints of the series combination of first and fourth magnetoresistive sense elements 292, 298 and second and third magnetoresistive sense elements 294, 296.

For illustrative purposes, resistances are provided in association with magnetoresistive sense elements 292, 294, 296, 298. In this example, a resistance 310, R1_(Z), represents the signal output of first magnetoresistive sense element 292. A resistance 312, R2_(Z), represents the signal output of second magnetoresistive sense element 294. A resistance 314, R3_(Z), represents the signal output of third magnetoresistive sense element 296. And, a resistance 316, R4_(Z), represents the signal output of fourth magnetoresistive sense element 298.

First magnetoresistive sense element 292 includes a first pinned layer 318 and a first sense layer 320 separated by an insulator layer 322. Similarly, second magnetoresistive sense element 294 includes a second pinned layer 324 and a second sense layer 326 separated by an insulator layer 328. Third magnetoresistive sense element 296 includes a third pinned layer 330 and a third sense layer 332 separated by an insulator layer 334. Fourth magnetoresistive sense element 298 includes a fourth pinned layer 336 and a fourth sense layer 338 separated by an insulator layer 340.

Additionally, Z-axis magnetic sensor 60 includes first and second permanent magnet layers 160, 161 positioned proximate each of first, second, third, and fourth magnetoresistive sense elements 292, 294, 296, 298. First and second permanent magnet layers 160, 161 magnetically bias indeterminate sense magnetization 80 (FIG. 3) of each of magnetoresistive sense elements 292, 294, 296, 298. Like X-axis and Y-axis magnetic sensors 56, 58 (FIGS. 5 and 7), first permanent magnet layer 160 is located out-of-plane above magnetoresistive sense elements 292, 294, 296, 298 and second permanent magnet layer 161 is located out-of-plane below magnetoresistive sense elements 292, 294, 296, 298.

Referring concurrently to FIGS. 8 and 9, FIG. 9 shows a table 342 demonstrating magnetization vectors of Z-axis magnetic field sensor 60. More particularly, table 342 provides a top view representation 344 of magnetoresistive sense elements 292, 294, 296, 298 and a side view representation 346 of magnetoresistive sense elements 292, 294, 296, 298. Top view representation 344 includes a symbol representing top views of first and third magnetoresistive sense elements 292, 296 with segments 348 of first permanent magnet layer 160 and segments 349 of second permanent magnet layers 161. More particularly, segments 348 of first permanent magnet layer 160 are positioned over and laterally displaced (leftwardly) away from first and third magnetoresistive sense elements 292, 296 and segments 349 of second permanent magnet layer 161 are positioned below and laterally displaced (rightwardly) away from first and third magnetoresistive sense elements 292, 296. Additionally, top view representation 344 includes another symbol representing top views of second and fourth magnetoresistive sense elements 294, 298 with segments 350 of first permanent magnet layer 160 and segments 351 of second permanent layer 161. More particularly, segments 350 of first permanent magnet layer 160 overlie (in this example illustration) second and fourth magnetoresistive sense elements 294, 298 and segments 351 of second permanent magnet layer 161 underlie (in this example illustration) second and fourth magnetoresistive sense elements 294, 298. Side view representation 346 provides a symbol representing side views of first and third magnetoresistive sense elements 292, 296 and another symbol representing side views of second and fourth magnetoresistive sense elements 294, 298. Dielectric material 176 is included with the side views representing first and third magnetoresistive sense elements 292, 296, as well as second and fourth magnetoresistive sense elements 294, 298 to illustrate an out-of-plane location of segments 348, 350 of first permanent magnet layer 160 and segments 349, 351 of second permanent magnet layer 161 relative to magnetoresistive sense elements 292, 294, 296, 298.

Each of first, second, third, and fourth pinned layers 318, 324, 330, 336 has a reference magnetization 352 oriented substantially parallel to X-Y plane 98. Furthermore, reference magnetization 352 is oriented in the same direction for each of first, second, third, and fourth pinned layers 318, 324, 330, 336. Thus, as shown in FIG. 8 and in top and side view representations 344, 346 of FIG. 10, reference magnetization 352 is directed rightwardly on the page so that reference magnetization 352 is parallel to X-axis 44.

Sense layers 320, 326, 332, 338 of magnetoresistive sense elements 292, 294, 296, 298 have an initial magnetic orientation that is indeterminate, e.g., indeterminate sense magnetization 80 (FIG. 3). In accordance with an embodiment, first and second permanent magnet layers 160, 161 magnetically bias first and third sense layers 320, 332 to have a first sense magnetization 354. Likewise, first and second permanent magnet layers 160, 161 magnetically bias second and fourth sense layers 326, 338 to have a second sense magnetization 356. As shown, first and second sense magnetizations 354, 356 are in an out-of-plane orientation relative to X-Y plane 98 that is non-perpendicular to X-Y plane 98. That is, first sense magnetization 354 is not skewed away from X-axis 44 within X-Y plane 98, but is tilted above X-Y plane 98 by an angular magnitude of, for example, forty five degrees. Conversely, second sense magnetization 356 is not skewed away from X-axis 44 within X-Y plane 98, but is tilted below X-Y plane 98 by the same angular magnitude of, for example forty five degrees. Thus, in top view orientation 344 of FIG. 9, first and second sense magnetizations 354, 356 are represented by dotted lines directed rightwardly on the page. However, in FIG. 8 and side view orientation 346 of FIG. 9, first sense magnetization 354 is represented by dotted lines that are tilted upwardly relative to Z-axis 42 and second sense magnetization 356 is represented by dotted lines that are tilted downwardly relative to Z-axis 42. In general, first and second sense magnetizations 354, 356 are orientable in response to Z magnetic field 30 in Z sensing direction 278.

In order to achieve the particular orientation of first and second sense magnetizations 354, 356, magnetization direction 186 of segments 348, 350 of first permanent magnet layer 160 and magnetization of segments 349, 351 of second permanent magnet layer 161 may oriented substantially parallel to Z-axis. Thus, magnetization direction 186 of segments 348, 349, 350, 351 is represented in FIG. 8 and side view representation 346 by arrows directed downwardly on the page, and magnetization direction 186 of segments 348, 349, 350, 351 is represented in top view representation 344 of FIG. 9 by circles with an inscribed X, denoting a direction going into the page. A single magnetization direction 186 of first and second permanent magnet layers 160, 161 as well as the location and geometry of the various segments of first and second permanent magnet layers 160, 161, is useful in achieving the three-axis sensing capability of magnetic field sensor package 54 (FIG. 2), as will be discussed in connection with FIG. 10.

Again utilizing the Miller index notation system, magnetization direction 186 of segments 348, 350 of first permanent magnet layer 160 and segments 349, 351 of second permanent magnet layer 161 may be characterized by Miller indices of [001] denoting that magnetization direction 186 is perpendicular to Z-axis 42. The orientation, or direction, of reference magnetization 352 for first, second, third, and fourth pinned layers 318, 324, 330, 336 of magnetoresistive sense elements 292, 294, 296, 298 can be characterized by Miller indices of [100] denoting that reference magnetization 352 is parallel to X-axis 44.

In the absence of an external magnetic field (e.g., Z magnetic field 30), segments 348 of first permanent magnet layer 160 and segments 349 of second permanent magnet layer 161 positioned proximate first and third magnetoresistive sense elements 292, 296 magnetically bias first sense magnetization 354 in a first direction 355 that is tilted above X-Y plane 98 by an angular magnitude, e.g., forty five degrees. Segments 350 of first permanent magnet layer 160 and segments 351 of second permanent magnet layer 161 positioned proximate second and fourth magnetoresistive sense elements 294, 298 magnetically bias second sense magnetization 356 in a second direction 357 that is tilted below X-Y plane 98 by the same angular magnitude as first sense magnetization 354. Thus, utilizing the Miller index notation system, first sense magnetization 354 can be characterized by Miller indices of [101] and second sense magnetization 356 can be characterized by Miller indices of [101].

FIG. 10 shows a table 358 of simplified plan views summarizing the function of the segments of the permanent magnet layer(s) for suitably biasing the sense layers of the magnetoresistive sense elements to achieve the three-axis sensing capability of magnetic field sensor package 54 (FIG. 2). In a multiple axis magnetic field sensor that includes, for example, X-axis magnetic field sensor 56, Y-axis magnetic field sensor 58, and Z-axis magnetic field sensor 60, the various magnetoresistive sense elements may be manufactured within the same buildup layers. In the illustrated embodiment, magnetization direction 186 of first and second permanent magnet layers 160, 161 is characterized by a single magnetic orientation that is perpendicular to X-Y plane 98. By incorporating a single magnetic orientation of first and second permanent magnet layers 160, 161 (for example, perpendicular to X-Y plane 98) and by suitably forming the various segments of first and second permanent magnet layers 160, 161, a desired direction of the sense magnetization of the various sense layers for the magnetoresistive sense elements may be achieved. Different shading is utilized in FIG. 10 to readily distinguish first permanent layer 160 from second permanent layer 161 in the various plan views described below.

Thus, table 358 includes a first plan view 360 demonstrating a magnetic field 362 (denoted by a block arrow) produced by segment 168 of first permanent magnet layer 160 and segment 170 of second permanent magnet layer 161 proximate first and third magnetoresistive sense elements 112, 116 that magnetically biases first and third sense layers 138, 150 to yield first sense magnetization 182 for X-axis magnetic field sensor 56. Similarly, table 358 includes a second plan view 364 demonstrating a magnetic field 366 (denoted by a block arrow) produced by segment 172 of first permanent magnet layer 160 and segment 174 of second permanent magnet layer 161 proximate second and fourth magnetoresistive sense elements 114, 118 that magnetically biases second and fourth sense layers 144, 156 to yield second sense magnetization 184 for X-axis magnetic field sensor 56.

Similarly, table 358 includes a third plan view 368 demonstrating a magnetic field 370 (denoted by a block arrow) produced by segment 262 of first permanent magnet layer 160 and segment 264 of second permanent magnet layer 161 proximate first and third magnetoresistive sense elements 208, 212 that magnetically biases first and third sense layers 234, 246 to yield first sense magnetization 274 for Y-axis magnetic field sensor 58. Similarly, table 358 includes a fourth plan view 372 demonstrating a magnetic field 374 (denoted by a block arrow) produced by segment 266 of first permanent magnet layer 160 and segment 268 of second permanent magnet layer 161 proximate second and fourth magnetoresistive sense elements 210, 214 that magnetically biases second and fourth sense layers 240, 252 to yield second sense magnetization 276 for Y-axis magnetic field sensor 58.

Table 358 additionally includes a fifth plan view 376 demonstrating a magnetic field 378 (denoted by a block arrow) produced by segment 348 of first permanent magnet layer 160 and segment 349 of second permanent magnet layer 161 (each of which are laterally displaced away from first and third magnetoresistive sense elements 292, 296 by a suitable distance) that magnetically biases first and third sense layers 320, 332 of first and third magnetoresistive sense elements 292, 296 to yield first sense magnetization 354 for Z-magnetic field sensor 60. Similarly, table 358 includes a sixth plan view 380 demonstrating a magnetic field 382 (denoted by a block arrows) produced by segment 350 of permanent magnet layer 160 overlying (in this example illustration) second and fourth magnetoresistive sense elements 294, 298 and segment 351 underlying (in this example illustration) second and fourth magnetoresistive sense elements 294, 298. Segments 350, 351 of respective first and second permanent magnet layers 160, 161 magnetically bias second and fourth sense layers 326, 338 of second and fourth magnetoresistive sense elements 294, 298 to yield second sense magnetization 356 of Z-axis magnetic field sensor 60. In fifth and sixth plan views 376, 380, first and second sense magnetizations 354, 356 are aligned with X-axis 44. Of course, first and second sense magnetizations 354, 356 are additionally tilted out of X-Y plane 98 as discussed above in connection with FIGS. 9 and 10.

Accordingly, first and second permanent magnet layers 160, 161 having single magnetization direction 186 that is perpendicular to X-Y plane 98 is useful in achieving the three-axis sensing capability of magnetic field sensor package 54 (FIG. 2) while reducing manufacturing complexity and cost. Furthermore, suitable locations and orientations of the segments of first and second permanent magnet layers 160, 161 can be developed to align the respective sense magnetizations of the magnetoresistive sense elements even when the sense layers of the sense elements initial have an indeterminate sense magnetization. Still further, Z-axis sensing can be achieved without the use of flux guides.

FIG. 11 shows a flowchart of a fabrication process 384 for manufacturing the magnetic field sensor of FIG. 2. Fabrication process 384 is described in connection with the fabrication of magnetic field sensor package 54 (FIG. 2) having three sense axes (e.g., X-axis, Y-axis, Z-axis magnetic field sensors 56, 58, 60). However, fabrication process 384 may be readily adapted to produce a single or dual sense axis magnetic field sensor.

Those skilled in the art will recognize that fabrication process 384 is exemplary in nature. Thus, only the primary operations of fabrication process 384 are discussed herein for simplicity. Furthermore, the process blocks depicted in FIG. 11 may be performed in parallel with each other or with performing other processes, and each process block will include many separate process steps. In addition, it is to be understood that the particular ordering of the process blocks depicted in FIG. 11 may be modified while achieving substantially the same result. Accordingly, such modifications are intended to be included within the scope of the inventive subject matter.

At a process block 386, a magnetic sensor wafer is built, i.e., fabricated, utilizing known methodologies to produce a plurality of sensor bridges (e.g., X-axis Wheatstone bridge 102 of FIG. 4, Y-axis Wheatstone bridge 198 of FIG. 6, and Z-axis Wheatstone bridge 282 of FIG. 8). Each of the sensors bridges are thus fabricated to include four sensor legs, with each sensor leg having one or more magnetoresistive sense elements, e.g., MTJ's. Furthermore, the magnetoresistive sense elements can be fabricated so that the magnetoresistive sense elements are formed in a common plane (i.e., they are arranged in-plane) relative to one another within a dielectric material with suitable electrically conductive interconnections. In accordance with an embodiment, the initial orientation of the sense magnetization of each of the sense layers of each of the magnetoresistive sense elements is indeterminate. That is, the sense layers have little or no initial (i.e., preset) direction of magnetization. Accordingly, there is no need to set (i.e., self-bias) the initial orientation of the sense magnetization of each of the sense layers of each of the magnetoresistive sense elements utilizing relatively complex and costly methodologies.

At a process block 388, one or more permanent magnet layers (e.g., first permanent magnet layer 160 and second permanent layer 161 of FIGS. 4, 6, and 8) is suitably formed in order to magnetically bias the sense magnetization of the magnetoresistive sense elements of each of the Wheatstone bridges, in the absence of an external magnetic field. Considerations for biasing the sense magnetization include selecting locations at which segments of the permanent magnet layer(s) will be positioned, a single out-of-plane spacing of the magnet segments from the magnetoresistive elements, a single thickness of the permanent magnet layer(s), and a single magnetic orientation. Formation of the permanent magnet layer(s) may entail deposition, patterning, and etching of a suitable material to form the magnet segments. Such material may include iron, nickel, cobalt, some alloys of rare earth materials or an alloy comprising any one or a combination of these elements that is magnetized and creates its own persistent magnetic field. Preferably, the permanent magnet layer(s) is formed from a magnetically “hard” material that is subjected to processing in a powerful magnetic field during manufacture to align its internal microcrystalline structure, so as to make it very difficult to demagnetize.

In accordance with an embodiment, five orientations of the sense magnetization may be set using first and second permanent magnet layers 160, 161. For example, a first orientation of first sense magnetization 182 (FIG. 5) for X-axis magnetic field sensor 56 and of first sense magnetization 274 (FIG. 7) for Y-axis magnetic field sensor 58 may be set. Additionally, a second orientation of second sense magnetization 184 (FIG. 5) for X-axis magnetic field sensor 56 and a third orientation of second sense magnetization 276 (FIG. 7) for Y-axis magnetic field sensor 58 may be set. Finally, a fourth orientation of first sense magnetization 354 (FIG. 9) and a fifth orientation of second sense magnetization 356 (FIG. 9) for Z-axis magnetic field sensor 60 may be set.

At a process block 390, the reference magnetization of the pinned layers of each of the magnetoresistive sense elements is set. In some embodiments, each magnetic field sensor may be programmed by setting the reference magnetization of the magnetoresistive sense elements in the predetermined direction in the X-Y plane of pinned layer. A programming operation may be thermally assisted (e.g., a thermally assisted switching process) wherein the programming operation includes heating selected ones of the MTJ magnetoresistive sense elements to a high temperature threshold. In such a situation, the magnetoresistive sense elements may include an antiferromagnetic layer (not shown) that pins the reference magnetization of the pinned layers at a low temperature threshold and frees the reference magnetization of the pinned layers at the high temperature threshold. Heating the selected magnetoresistive sense elements at the high temperature threshold may be performed by passing a heating current in the selected magnetoresistive sense elements via a current line (not shown). Other techniques may be implemented to provide localized heating, such as from a separate adjacent current line, by using a laser or other radiative source, and so forth. After switching the reference magnetization to the desired fixed magnetization orientation, the selected magnetoresistive sense elements can be cooled to the low temperature threshold to pin, or fix, the reference magnetization in the switched state. Other embodiments may employ existing or upcoming techniques for pinning the reference magnetization to a desired magnetization orientation so as to achieve the multiple fixed orientations of the reference magnetization of the pinned layer of magnetoresistive sense elements.

In accordance with an embodiment, two orientations of the reference magnetization may be set. For example, the one orientation of first and second reference magnetization 178, 180 (FIG. 5) for X-axis magnetic field sensor 56, and the one orientation of reference magnetizations 270, 272 (FIG. 7) for Y-axis magnetic field sensor 58, as well as for reference magnetizations 354, 356 (FIG. 9) for Z-axis magnetic field sensor 60 may be set. At a process block 392, fabrication of the magnetic sensor wafer continues with fabrication finalization processes such was wafer level testing, dicing, packaging, and the like. Thereafter, fabrication process 380 ends.

Thus, embodiments disclosed herein entail a magnetic field sensor capable of sensing magnetic fields along one or more mutually exclusive sense axes, typically referred to as the X-axis, Y-axis, and Z-axis. An embodiment of a magnetic field sensor comprises a sensor bridge having a first leg and a second leg for sensing an external magnetic field along a sensing direction oriented substantially perpendicular to a plane of the magnetic field sensor. A first magnetoresistive sense element is formed in the first leg, the first magnetoresistive sense element including a first pinned layer and a first sense layer. A second magnetoresistive sense element is formed in the second leg, the second magnetoresistive sense element including a second pinned layer and a second sense layer, each of the first and second pinned layers having a reference magnetization oriented substantially parallel to the plane, each of the first and second sense layers having an indeterminate magnetization state. A permanent magnet layer is proximate the first and second magnetoresistive sense elements, wherein in the absence of the external magnetic field, the permanent magnet layer magnetically biases the indeterminate magnetization state in an out-of-plane orientation relative to the plane to produce a first sense magnetization of the first sense layer and a second sense magnetization of the second sense layer, the first sense magnetization being oriented in a first direction and the second sense magnetization being oriented in a second direction that differs from the first direction.

Another embodiment of a magnetic field sensor comprises a sensor bridge having a first leg and a second leg for sensing an external magnetic field along a sensing direction oriented substantially perpendicular to a plane of the magnetic field sensor. A first magnetoresistive sense element is formed in the first leg, the first magnetoresistive sense element including a first pinned layer and a first sense layer. A second magnetoresistive sense element is formed in the second leg, the second magnetoresistive sense element including a second pinned layer and a second sense layer, each of the first and second pinned layers having a reference magnetization oriented in the same direction substantially parallel to the plane, each of the first and second sense layers having an indeterminate magnetization state. A permanent magnet layer is proximate the first and second magnetoresistive sense elements, wherein in the absence of the external magnetic field, the permanent magnet layer magnetically biases the indeterminate magnetization state in an out-of-plane orientation relative to the plane to produce a first sense magnetization of the first sense layer and a second sense magnetization of the second sense layer, the first sense magnetization being oriented in a first direction and the second sense magnetization being oriented in a second direction that differs from the first direction, and the out-of-plane orientation of each of the first and second sense magnetizations of the first and second sense layers being non-perpendicular to the plane of the magnetic field sensor.

Another embodiment of a magnetic field sensor comprises a first sensor bridge having a first leg and a second leg for sensing an external magnetic field along a first sensing direction oriented substantially perpendicular to a plane of the magnetic field sensor. A first magnetoresistive sense element is formed in the first leg, the first magnetoresistive sense element including a first pinned layer and a first sense layer, and a second magnetoresistive sense element formed in the second leg, the second magnetoresistive sense element including a second pinned layer and a second sense layer. The magnetic field sensor further comprises a second sensor bridge having a third leg and a fourth leg for sensing the external magnetic field along a second sensing direction oriented substantially parallel to the plane of the magnetic field sensor and orthogonal to the first sensing direction. A third magnetoresistive sense element is formed in the third leg, the third magnetoresistive sense element including a third pinned layer and a third sense layer, and a fourth magnetoresistive sense element is formed in the fourth leg, the fourth magnetoresistive sense element including a fourth pinned layer and a fourth sense layer, each of the first, second, third, and fourth pinned layers having a reference magnetization oriented substantially parallel to the plane of the magnetic field sensor, and each of the first, second, third, and fourth sense layers having an indeterminate magnetization state. A permanent magnet layer is proximate the first, second, third, and fourth magnetoresistive sense elements, the permanent magnet layer being characterized by a single magnetic orientation, wherein in the absence of the external magnetic field, the permanent magnet layer magnetically biases the indeterminate magnetization state in an out-of-plane orientation relative to the plane to produce a first sense magnetization of the first sense layer of the first sense layer, a second sense magnetization of the second sense layer, a third sense magnetization of the third sense layer, and a fourth sense magnetization of the fourth sense layer.

Accordingly, a unique sensor bridge design of magnetoresistive sense elements is implemented for each sense axis. Each sensor bridge incorporates an in-plane orientation of reference magnetization of the pinned layer. For each sensor bridge, one or more permanent magnet layers are strategically patterned (shape and position) to generate a unique external bias field vector of the sense magnetization of the sense layer to produce a balanced bridge configuration of magnetoresistive sense elements for the sensor bridge without built-in, zero field offset. Additionally, one sensor bridge design is utilized for sensing an external magnetic field that is perpendicular to the plane of the magnetic field sensor package without the use of flux concentrators. The strategically patterned permanent magnet layer(s) for this sensor bridge additionally allows it to respond to the out-of-plane external magnetic field without inter-axis coupling of sensor response. The various inventive concepts and principles embodied herein enable an ultra-low power, multiple sense axis magnetic field sensor without detrimental perming effects for improved sensitivity, reliability, and cost savings.

This disclosure is intended to explain how to fashion and use various embodiments in accordance with the invention rather than to limit the true, intended, and fair scope and spirit thereof. The foregoing description is not intended to be exhaustive or to limit the invention to the precise form disclosed. Modifications or variations are possible in light of the above teachings. The embodiment(s) was chosen and described to provide the best illustration of the principles of the invention and its practical application, and to enable one of ordinary skill in the art to utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. All such modifications and variations are within the scope of the invention as determined by the appended claims, as may be amended during the pendency of this application for patent, and all equivalents thereof, when interpreted in accordance with the breadth to which they are fairly, legally, and equitably entitled. 

What is claimed is:
 1. A magnetic field sensor comprising: a sensor bridge having a first leg and a second leg for sensing an external magnetic field along a sensing direction oriented substantially perpendicular to a plane of said magnetic field sensor; a first magnetoresistive sense element formed in said first leg, said first magnetoresistive sense element including a first pinned layer and a first sense layer; a second magnetoresistive sense element formed in said second leg, said second magnetoresistive sense element including a second pinned layer and a second sense layer, each of said first and second pinned layers having a reference magnetization oriented substantially parallel to said plane, each of said first and second sense layers having an indeterminate magnetization state; and a permanent magnet layer proximate said first and second magnetoresistive sense elements, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state in an out-of-plane orientation relative to said plane to produce a first sense magnetization of said first sense layer and a second sense magnetization of said second sense layer, said first sense magnetization being oriented in a first direction and said second sense magnetization being oriented in a second direction that differs from said first direction.
 2. The magnetic field sensor of claim 1 wherein said reference magnetization of each of said first and second pinned layers is oriented in the same direction substantially parallel to said plane.
 3. The magnetic field sensor of claim 1 wherein in the absence of said external magnetic field, said out-of-plane orientation of each of said first and second sense magnetizations of said first and second sense layers is non-perpendicular to said plane of said magnetic field sensor.
 4. The magnetic field sensor of claim 1 wherein: said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system; said first direction of said first sense magnetization is oriented substantially parallel to said first axis and is tilted above said plane of said magnetic field sensor by a first angular magnitude; and said second direction of said second sense magnetization is oriented substantially parallel to said first axis and is tilted below said plane of said magnetic field sensor by a second angular magnitude that is equivalent to said first angular magnitude.
 5. The magnetic field sensor of claim 1 wherein: said first sense magnetization of said first sense layer of said first magnetoresistive sense element is orientable from said first direction toward or away from said plane of said magnetic field sensor in response to said external magnetic field; and said second sense magnetization of said second sense layer of said second magnetoresistive sense element is orientable from said second direction toward or away from said plane of said magnetic field sensor in response to said external magnetic field.
 6. The magnetic field sensor of claim 1 wherein said permanent magnet layer is characterized by a single magnetic orientation.
 7. The magnetic field sensor of claim 1 wherein said permanent magnet layer is a first permanent magnet layer and said magnetic field sensor further comprises a second permanent magnet layer vertically displaced away from said first permanent magnet layer, wherein said first and second permanent magnet layers function cooperatively to magnetically bias said indeterminate magnetization state of said first and second magnetoresistive sense elements in said out-of-plane orientation relative to said plane.
 8. The magnetic field sensor of claim 1 wherein said sensor bridge is a first sensor bridge, said sensing direction is a first sensing direction, and said magnetic field sensor further comprises: a second sensor bridge having a third leg and a fourth leg for sensing said external magnetic field along a second sensing direction oriented substantially parallel to said plane of said magnetic field sensor and orthogonal to said first sensing direction; a third magnetoresistive sense element formed in said third leg, said third magnetoresistive sense element including a third pinned layer and a third sense layer; a fourth magnetoresistive sense element formed in said fourth leg, said fourth magnetoresistive sense element including a fourth pinned layer and a fourth sense layer, each of said third and fourth pinned layers having said reference magnetization oriented substantially parallel to said plane of said magnetic field sensor, and each of said third and fourth sense layers having said indeterminate magnetization state; and said permanent magnet layer is positioned proximate said third and fourth magnetoresistive sense elements, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state of said third and fourth magnetoresistive sense elements in an in-plane orientation relative to said plane to produce a third sense magnetization of said third sense layer and a fourth sense magnetization of said fourth sense layer.
 9. The magnetic field sensor of claim 8 wherein: said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system; and said reference magnetization of each of said first, second, third, and fourth pinned layers is oriented in the same direction substantially parallel to said first axis.
 10. The magnetic field sensor of claim 8 wherein: said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system; said reference magnetization of each of said first and second pinned layers is oriented in the same direction substantially parallel to said first axis; and said reference magnetization of each of said third and fourth pinned layers is oriented in the same direction substantially parallel to said second axis.
 11. The magnetic field sensor of claim 8 wherein: said third direction of said third sense magnetization is oriented in a first <hkl> direction, wherein h, k, and l are Miller indices, <hkl> represents a family of directions, and said first <hkl> direction is characterized by said Miller indices of [110]; and said fourth direction of said fourth sense magnetization is oriented in a second <hkl> direction relative to said first <hkl> direction, wherein one of said “h” and “k” is a negative value of a corresponding one of said “h” and “k” of said first <hkl> direction.
 12. The magnetic field sensor of claim 8 wherein said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system, and said second sensing direction is parallel to said first axis.
 13. The magnetic field sensor of claim 12 further comprising: a third sensor bridge having a fifth leg and a sixth leg for sensing said external magnetic field along a third sensing direction parallel to said second axis; a fifth magnetoresistive sense element formed in said fifth leg, said fifth magnetoresistive sense element including a fifth pinned layer and a fifth sense layer; a sixth magnetoresistive sense element formed in said sixth leg, said sixth magnetoresistive sense element including a sixth pinned layer and a sixth sense layer, each of said fifth and sixth pinned layers having said reference magnetization oriented substantially parallel to said plane of said magnetic field sensor, and each of said fifth and sixth sense layers having said indeterminate magnetization state; and said permanent magnet layer is positioned proximate said fifth and sixth magnetoresistive sense elements, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state of said fifth and sixth magnetoresistive sense elements in said in-plane orientation relative to said plane to produce a fifth sense magnetization of said fifth sense layer and a sixth sense magnetization of said sixth sense layer, said fifth sense magnetization being oriented in a fifth direction and said sixth sense magnetization being oriented in a sixth direction that differs from said fifth direction.
 14. The magnetic field sensor of claim 13 wherein: each of said third and fifth directions of said third and fifth sense magnetizations is oriented in a first <hkl> direction, wherein h, k, and l are Miller indices, <hkl> represents a family of directions, and said first <hkl> direction is characterized by said Miller indices of [110]; said fourth direction of said fourth sense magnetization is oriented in a second <hkl> direction characterized by said Miller indices of [110]; and said sixth direction of said sixth sense magnetization is oriented in a third <hkl> direction characterized by said Miller indices of [110].
 15. A magnetic field sensor comprising: a sensor bridge having a first leg and a second leg for sensing an external magnetic field along a sensing direction oriented substantially perpendicular to a plane of said magnetic field sensor; a first magnetoresistive sense element formed in said first leg, said first magnetoresistive sense element including a first pinned layer and a first sense layer; a second magnetoresistive sense element formed in said second leg, said second magnetoresistive sense element including a second pinned layer and a second sense layer, each of said first and second pinned layers having a reference magnetization oriented in the same direction substantially parallel to said plane, each of said first and second sense layers having an indeterminate magnetization state; and a permanent magnet layer proximate said first and second magnetoresistive sense elements, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state in an out-of-plane orientation relative to said plane to produce a first sense magnetization of said first sense layer and a second sense magnetization of said second sense layer, said first sense magnetization being oriented in a first direction and said second sense magnetization being oriented in a second direction that differs from said first direction, and said out-of-plane orientation of each of said first and second sense magnetizations of said first and second sense layers being non-perpendicular to said plane of said magnetic field sensor.
 16. The magnetic field sensor of claim 15 wherein: said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system; said first direction of said first sense magnetization is oriented substantially parallel to said first axis and is tilted above said plane of said magnetic field sensor by a first angular magnitude; and said second direction of said second sense magnetization is oriented substantially parallel to said first axis and is tilted below said plane of said magnetic field sensor by a second angular magnitude that is equivalent to said first angular magnitude.
 17. The magnetic field sensor of claim 15 wherein: said first sense magnetization of said first sense layer of said first magnetoresistive sense element is orientable from said first direction toward or away from said plane of said magnetic field sensor in response to said external magnetic field; and said second sense magnetization of said second sense layer of said second magnetoresistive sense element is orientable from said second direction toward or away from said plane of said magnetic field sensor in response to said external magnetic field.
 18. A magnetic field sensor comprising: a first sensor bridge having a first leg and a second leg for sensing an external magnetic field along a first sensing direction oriented substantially perpendicular to a plane of said magnetic field sensor; a first magnetoresistive sense element formed in said first leg, said first magnetoresistive sense element including a first pinned layer and a first sense layer; a second magnetoresistive sense element formed in said second leg, said second magnetoresistive sense element including a second pinned layer and a second sense layer; a second sensor bridge having a third leg and a fourth leg for sensing said external magnetic field along a second sensing direction oriented substantially parallel to said plane of said magnetic field sensor and orthogonal to said first sensing direction; a third magnetoresistive sense element formed in said third leg, said third magnetoresistive sense element including a third pinned layer and a third sense layer; a fourth magnetoresistive sense element formed in said fourth leg, said fourth magnetoresistive sense element including a fourth pinned layer and a fourth sense layer, each of said first, second, third, and fourth pinned layers having a reference magnetization oriented substantially parallel to said plane of said magnetic field sensor, and each of said first, second, third, and fourth sense layers having an indeterminate magnetization state; and a permanent magnet layer proximate said first, second, third, and fourth magnetoresistive sense elements, said permanent magnet layer being characterized by a single magnetic orientation, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state in an out-of-plane orientation relative to said plane to produce a first sense magnetization of said first sense layer, a second sense magnetization of said second sense layer, a third sense magnetization of said third sense layer, and a fourth sense magnetization of said fourth sense layer.
 19. A magnetic field sensor as claimed in claim 18 wherein said plane of said magnetic field sensor is characterized by a first axis and a second axis of a three-dimensional coordinate system, and said second sensing direction is parallel to said first axis, and said magnetic field sensor further comprises: a third sensor bridge having a fifth leg and a sixth leg for sensing said external magnetic field along a third sensing direction parallel to said second axis; a fifth magnetoresistive sense element formed in said fifth leg, said fifth magnetoresistive sense element including a fifth pinned layer and a fifth sense layer; a sixth magnetoresistive sense element formed in said sixth leg, said sixth magnetoresistive sense element including a sixth pinned layer and a sixth sense layer, each of said fifth and sixth pinned layers having said reference magnetization oriented substantially parallel to said plane of said magnetic field sensor, and each of said fifth and sixth sense layers having said indeterminate magnetization state; and said permanent magnet layer is positioned proximate said fifth and sixth magnetoresistive sense elements, wherein in the absence of said external magnetic field, said permanent magnet layer magnetically biases said indeterminate magnetization state of said fifth and sixth magnetoresistive sense elements in said in-plane orientation relative to said plane to produce a fifth sense magnetization of said fifth sense layer and a sixth sense magnetization of said sixth sense layer, said fifth sense magnetization being oriented in a fifth direction and said sixth sense magnetization being oriented in a sixth direction.
 20. The magnetic field sensor of claim 19 wherein: said first direction of said first sense magnetization is oriented in a first <hkl> direction, wherein h, k, and l are Miller indices, <hkl> represents a family of directions, and said first <hkl> direction is characterized by said Miller indices of [101]; said second direction of said second sense magnetization is oriented in a second <hkl> direction characterized by said Miller indices of [101]; each of said third and fifth directions of said third and fifth sense magnetizations is oriented in a third <hkl> direction characterized by said Miller indices of [110]; said fourth direction of said fourth sense magnetization is oriented in a fourth <hkl> direction characterized by said Miller indices of [110]; and said sixth direction of said sixth sense magnetization is oriented in a fifth <hkl> direction characterized by said Miller indices of [110]. 